Applied Materials® P5000
Introduced in April 1987, the Applied Precision 5000 is the original Applied Materials cluster tool and one of the industry’s first single-wafer, multi-chamber platforms. The P5000 can be configured with up to four process chambers for 100, 125, 150, or 200mm wafers. Additionally, this tool provides multiple chamber configurations for CVD, Etch and photoresist strip applications, supporting more than 50 unique processes.