Applied Materials P5000 Robot Refurbishment

Part Numbers

0010-09029 ASSY, ROBOT DRIVE
0010-13320 ASSY, ROBOT DRIVE, 4″, 5″, 6″
0010-13321 ASSY, ROBOT DRIVE, 8″
0010-76000 ASSY, ROBOT DRIVE, 4″, 5″, 6″
0010-76015 ASSY ROBOT DRIVE 8″

Remanufacturing Process

Complete assembly disassembly, inspection, reassembly and test. Our refurbished assemblies are remanufactured with quality and cleanliness at the forefront. High failure items and consumables are replaced as a standard on STS rebuilds, see list BOM below. All recycled assembly components are inspected prior to remanufacture and replaced (additional cost) when unable to meet OEM requirements.

Replaced Components
Item Description Qty
1 GEAR, IDLE, ROBOT DRIVE 1
2 BRG BALL .375 ID .875 OD RNG SHLD 3
3 BRG BALL .750 ID X 1.625 OD SHLD 1
4 BRG BALL 1.000OD X .750ID X .1562W ABE 2
5 BRG BALL FLG .375ID .875OD .2812W DBL SHLD 7
6 CABLE ASSEMBLY 4
7 RTNR RING EXT .375 SFT BOWED SST 2
8 FEED THRU ASSY,CAP SENSOR 1
9 CBL ASSY ENCODER FLAT FLEX 6 POS 1
10 CABLE ASSY ENCODER FLAT FLEX 34 POS 1
11 SEAL DYN RADIAL 2.243ODX2IDX.235W SST30 1
12 SEAL DYN RADIAL 1.241ODX.998IDX.235W SS 1
13 BELT TMG 3MMP 6MMW 84T HTD NEOPRENE 1
14 BELT TMG 3MMP 6MMW 96T HTD NEOPRENE 1
15 O RING ID.737X.103W VITO 2
16 ORING ID 1.489 CSD .070 VITON 75 DURO BL 1
17 ORING ID .739 CSD .070 VITON 70DURO 1
18 O-RING ID.239 CSD .070 VITON 1
Testing
  • Robot installed on Applied Materials P5000 mainframe and loadlock placed under vacuum.
  • 4 hour sequencer cycle test while pumping for vacuum integrity test
  • Vacuum leak rate verification
  • Belt and cable tension readjusted.
  • Handler calibration procedure performed.
  • 250 wafer cycling test from cassette loader to process chambers.
  • Reverify vacuum leak rate qualification.
  • Robot removal and final quality check
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