0010-09029 ASSY, ROBOT DRIVE
0010-13320 ASSY, ROBOT DRIVE, 4″, 5″, 6″
0010-13321 ASSY, ROBOT DRIVE, 8″
0010-76000 ASSY, ROBOT DRIVE, 4″, 5″, 6″
0010-76015 ASSY ROBOT DRIVE 8″
0010-09340 SUSCEPTOR LIFT ASSY
0010-09341 WAFER LIFT ASSY
0010-10283 SUSCEPTOR LIFT BASIC ASSEMBLY
0010-30062 ASSY, BASIC, SUSCEPTOR/P-CHUCK LIFT