DxL Wafer Lift and Susceptor Lift Refurbishment with Cycle Test
Wafer Lift and Susceptor Lift Refurbishment with Cycle Test
0010-09340 SUSCEPTOR LIFT ASSY
0010-09341 WAFER LIFT ASSY
0010-10283 SUSCEPTOR LIFT BASIC ASSEMBLY
0010-30062 ASSY, BASIC, SUSCEPTOR/P-CHUCK LIFT
Complete assembly disassembly, inspection, reassembly and test. Our refurbished assemblies are remanufactured with quality and cleanliness at the forefront. High failure items and consumables are replaced as a standard on STS rebuilds, see list BOM below. All recycled assembly components are inspected prior to remanufacture and replaced (additional cost) when unable to meet OEM requirements.
|1||Bearing, Ball LT .250 ID x .625 OD x .196W||4|
|2||Belt Timing .080P 1/4W 85T Urethane Body Polyester||1|
|3||Coupling, Shaft JSPDR 1/4″ Bore||1|
|4||Super Nut, Lead Screw||1|
Functional test for mechanical and electrical operation. Installation on Applied Materials P5000 chamber and cycle tested.