Wafer Lift and Susceptor Lift Refurbishment with Cycle Test

0010-09340 SUSCEPTOR LIFT ASSY
0010-09341 WAFER LIFT ASSY
0010-10283 SUSCEPTOR LIFT BASIC ASSEMBLY
0010-30062 ASSY, BASIC, SUSCEPTOR/P-CHUCK LIFT

Complete assembly disassembly, inspection, reassembly and test. Our refurbished assemblies are remanufactured with quality and cleanliness at the forefront. High failure items and consumables are replaced as a standard on STS rebuilds, see list BOM below. All recycled assembly components are inspected prior to remanufacture and replaced (additional cost) when unable to meet OEM requirements.

Item Description Qty
1 Bearing, Ball LT .250 ID x .625 OD x .196W 4
2 Belt Timing .080P 1/4W 85T Urethane Body Polyester 1
3 Coupling, Shaft JSPDR 1/4″ Bore 1
4 Super Nut, Lead Screw 1

Functional test for mechanical and electrical operation. Installation on Applied Materials P5000 chamber and cycle tested.

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