DxL Wafer Lift and Susceptor Lift Refurbishment with Cycle Test
Wafer Lift and Susceptor Lift Refurbishment with Cycle Test
Part Numbers
0010-09340 SUSCEPTOR LIFT ASSY
0010-09341 WAFER LIFT ASSY
0010-10283 SUSCEPTOR LIFT BASIC ASSEMBLY
0010-30062 ASSY, BASIC, SUSCEPTOR/P-CHUCK LIFT
Remanufacturing Process
Complete assembly disassembly, inspection, reassembly and test. Our refurbished assemblies are remanufactured with quality and cleanliness at the forefront. High failure items and consumables are replaced as a standard on STS rebuilds, see list BOM below. All recycled assembly components are inspected prior to remanufacture and replaced (additional cost) when unable to meet OEM requirements.
Replaced Components
| Item | Description | Qty |
| 1 | Bearing, Ball LT .250 ID x .625 OD x .196W | 4 |
| 2 | Belt Timing .080P 1/4W 85T Urethane Body Polyester | 1 |
| 3 | Coupling, Shaft JSPDR 1/4″ Bore | 1 |
| 4 | Super Nut, Lead Screw | 1 |
Testing
Functional test for mechanical and electrical operation. Installation on Applied Materials P5000 chamber and cycle tested.
